Bottom-up approach to silicon nanoelectronics

This paper presents a brief review of our recent work investigating a novel bottom-up approach to realize silicon-based nanoelectronics. We discuss fabrication technique, electronic properties, and device applications of silicon nanodots as a building block for various nanoscale silicon devices. r 2006 Published by Elsevier Ltd.

• Type: Journal
• Year: 2008
• Where: MJ
• Authors: Hiroshi Mizuta, Shunri Oda
• Keywords: MJ 2008, Nanoscale Silicon Devices, Silicon Nanodots, Silicon-based Nanoelectronics