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31

TCAD
2008

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CMP Fill Synthesis: A Survey of Recent Studies

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CMP Fill Synthesis: A Survey of Recent Studies

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We survey recent research and practice in the area of chemical

Andrew B. Kahng, Kambiz Samadi

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Large-scale Integration Metallization | Mere Density Uniformity | Post-CMP Wafer Topography | TCAD 2008 |

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Added	15 Dec 2010
Updated	15 Dec 2010
Type	Journal
Year	2008
Where	TCAD
Authors	Andrew B. Kahng, Kambiz Samadi

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