Design and Modeling of a Mems-Based Valveless Pump Driven by an Electromagnetic Force

A novel valveless micro impedance pump is proposed and analyzed in this study. The pump is constructed of a upper glass plate, two glass tubes, a PDMS (polydimethylsilxane) diaphragm with an electromagnetic actuating mechanism and a glass substrate. The actuating mechanism comprises an electroplated permanent magnet mounted on a flexible PDMS diaphragm and electroplated Cu coils located on a glass substrate. The upper glass plate, PDMS diaphragm and the glass substrate were aligned and assembled to form a micro channel with a compressible section surrounded by a rigid section, creating an acoustic mismatch in the channel. The electromagnetic force between the magnet and the Cu coils causes the diaphragm to deflect and then creates the accumulative effects of wave propagation and reflection at the junction of the compressible and rigid sections. The resulting pressure gradient in the fluid drives the flow from the inlet to the outlet of the micropump. The constituent parts of the elect...

• Type: Journal
• Year: 2007
• Where: CORR
• Authors: Hsien-Tsung Chang, Chia-Yen Lee, Chih-Yung Wen
• Keywords: Actuating Mechanism, CORR 2007, Education, Glass Substrate, Upper Glass Plate