Design, fabrication and performance of a new vibration-based electromagnetic micro power generator

This paper presents a new vibration-based electromagnetic micro power generator fabricated using microelectromechanical systems (MEMS) technology, which can convert ambient vibration energy into electric power. The microgenerator consists of a permanent magnet of NdFeB, a copper planar spring and a two-layer copper coil. ANSYS modal analysis was used to predict the resonant frequencies and resonant vibration modes of the spring-mass system. The detailed fabrication processes of the microgenerator are given.

• Type: Journal
• Year: 2007
• Where: MJ
• Authors: Pei-Hong Wang, Xu-Han Dai, Dong-Ming Fang, Xiao-Lin Zhao
• Keywords: Ambient Vibration Energy, Electromagnetic Micro Power, MJ 2007, Two-layer Copper Coil