Design Optimization for an Electro-Thermally Actuated Polymeric Microgripper

Thermal micro-actuators are a promising solution to the need for large-displacement, gentle handling force, low-power MEMS actuators. Potential applications of these devices are micro-relays, assembling and miniature medical instrumentation. In this paper the development of thermal microactuators based on SU-8 polymer is described. The paper presents the development of a new microgripper which can realize a movement of the gripping arms with possibility for positioning and manipulating of the gripped object. Two models of polymeric microgripper electrothermo-mechanical actuated, using low actuation voltages, designed for SU-8 polymer fabrication were presented. The electro-thermal microgrippers were designed and optimized using finite element simulations. Electro-thermo-mechanical simulations based on finite element method were performed for each of the model in order to compare the results. Preliminary experimental tests were carried out.

• Type: Journal
• Year: 2008
• Where: CORR
• Authors: R. Voicu, R. Muller, L. Eftime
• Keywords: CORR 2008, Education, Finite Element, Low-power Mems Actuators, Miniature Medical Instrumentation