Realize the operating conditions of a manufacturing plant are essential for providing corresponding actions responsively. This is because all processes are interrelated and a small fluctuation can affect overall performance in such a dynamic system. Presently, substantial integrations in both the hardware and the software are required to monitor the fabrication processes. More importantly, the decision model to interpreting the information from the associated monitoring devices is usually a great challenge due to its complexity and great variety for different cases. To overcome this integration bottleneck, we propose an alternative method. The concept is to treat the plant as a whole and with the help of identical counting facilities; both the quantitative and qualitative issues at the plant can be reflected. Simulations have been employed to verify the results and it showed that with the assistance of the proposed technique, problematic locations could be identified when the plant wa...
C. S. Tang, C. Y. Chan, Kai-Leung Yung