Evolutionary computation applied to the tuning of MEMS gyroscopes

We propose a tuning method for MEMS gyroscopes based on evolutionary computation to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation. Track Category: Evolvable Hardware Keywords Genetic Algorithms, Simulated Annealing, Dynamic Hill Climbing, Evolvable Hardware, Gyroscope, MEMS.

• Type: Conference
• Year: 2005
• Where: GECCO
• Authors: Didier Keymeulen, Wolfgang Fink, Michael I. Ferguson, Chris Peay, Boris Oks, Richard Terrile, Karl Yee
• Keywords: Evolvable Hardware, GECCO 2005, Mems Gyroscope, Post-resonator MEMS