Micro-Ball Lens Array Fabrication in Photoresist Using Ptfe Hydrophobic Effect

This paper presents a simple method to fabricate micro-ball lens and its array. The key technology is to use the hydrophobic characteristics of polyterafluoroethylene (PTFE) substrate. High contact angle between melted photoresist pattern and PTFE can generate micro-ball lens and its array. PTFE thin film was spun onto a silicon wafer and dried in oven. Photoresist AZ4620 was used to pattern micro-columns with different diameters 60, 70 and 80 μm. A thermal reflow process then was applied to melt these micro-column patterns resulted in micro-ball lens array. The achieved micro-ball lens array with diameter 98 μm was fabricated using 80 μm in diameter patterns. This method provides a simple fabrication process and low material cost.

• Type: Journal
• Year: 2007
• Where: CORR
• Authors: Ruey-Fang Shyu, Hsiharng Yang, Wen-Ren Tsai, Jhy-Cherng Tsai
• Keywords: CORR 2007, Education, Micro-ball Lens, Micro-ball Lens Array, PTFE