Silicon on Nothing Mems Electromechanical Resonator

The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro Electro Mechanical Systems (MEMS) are good candidates to allow reconfigurable RF functions such as filters, oscillators or antennas. This paper will focus on the MEMS electromechanical resonators which show interesting performances to replace SAW filters or quartz reference oscillators, allowing smaller integrated functions with lower power consumption. The resonant frequency depends on the material properties, such as Young's modulus and density, and on the movable mechanical structure dimensions (beam length defined by photolithography). Thus, it is possible to obtain multi frequencies resonators on a wafer. The resonator performance (frequency, quality factor) strongly depends on the environment, like moisture or pressure, which imply the need for a vacuum package. This paper will present first reson...

• Type: Journal
• Year: 2008
• Where: CORR
• Authors: Cedric Durand, Fabrice Casset, Pacal Ancey, Fabienne Judong, Alexandre Talbot, Reni Quenouillere, Denis Renaud, Stephan Borel, Brigitte Florin, Lionel Buchaillot
• Keywords: CORR 2008, Education, MEMS Electromechanical Resonators, Reconfigurable Rf Functions, Resonator