A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation

—This paper reports the design and development processes of a totally decoupled flexure-based XYZ parallel-kinematics micropositioning stage with piezoelectric actuation. The uniqueness of the proposed XYZ stage lies in that it possesses both input and output decoupling properties with integrated displacement amplifiers. The input decoupling is realized by actuation isolation using double compound parallelogram flexures with large transverse stiffness, and the output decoupling is implemented by employing two-dimensional (2-D) compound parallelogram flexures. By simplifying each flexure hinge as a two-degree-of-freedom (2-DOF) compliant joint, analytical models of kinematics, statics, and dynamics of the XYZ stage are established and then validated with finite-element analysis (FEA). The derived models are further adopted for optimal design of the stage through particle swarm optimization (PSO), and a prototype of XYZ stage is fabricated for performance tests. The nonsymmetric ...

• Type: Journal
• Year: 2011
• Where: TASE
• Authors: Yangmin Li, Qingsong Xu
• Keywords: Input, Software Engineering, TASE 2011, XYZ Stage, flexure Hinges