22 search results - page 1 / 5 » Application of MEMS technologies to nanodevices |
ISCAS
2003
IEEE
14 years 1 months ago
2003
IEEE
CF
2004
ACM
14 years 1 months ago
2004
ACM
Nanoelectronics research has primarily focused on devices. By contrast, not much has been published on innovations at higher layers: we know little about how to construct circuits...
TIM
2011
13 years 2 months ago
2011
—In this paper, an inertial transducer developed in bulk and etch silicon-on-insulator microelectromechanical-system technology is presented. The device is suitable for low-frequ...
ICCAD
2006
IEEE
14 years 1 months ago
2006
IEEE
CMOS-MEMS integration can improve the performance of the MEMS (micro-electromechanical systems), allows for smaller packages and leads to a lower packaging and instrumentation cos...
ICCAD
2006
IEEE
14 years 4 months ago
2006
IEEE
Leveraging conventional microsystems technology, MEMS has become the technology of choice for a wide range of applications including inertial sensors for automotive, games, and co...