A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have in...
This paper proposes an analytical model useful in the design of conveyor-based Automated Material Handling Systems (AMHS) to support semiconductor manufacturing. The objective is ...
Dima Nazzal, Andrew Johnson, Hector J. Carlo, Jesu...
Semiconductor wafer fabrication facilities (wafer fabs) are among the most complex production facilities. A large product variety, hundreds of processing steps per product, hundre...
Wafers in a 300-mm semiconductor fabrication facility are transported throughout the factory in carriers called front opening unified pods (FOUPs). Two standard capacities of FOUP...