In this paper, we suggest a linear programming formulation that allows for solving volume and capacity planning problems in semiconductor manufacturing systems. We assume a genera...
— Modeling and scheduling of cluster tools are critical to improving the productivity and to enhancing the design of wafer processing flows and equipment for semiconductor manuf...
Jingang Yi, Shengwei Ding, Dezhen Song, Mike Tao Z...
A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have in...
This paper discusses the development of a set of object-oriented modular simulation tools for solving lumped and spatially distributed models generated from chemical process desig...
The design productivity gap has been recognized by the semiconductor industry as one of the major threats to the continued growth of system-on-chips and embedded systems. Ad-hoc sy...