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CORR
2008
Springer
87views Education» more  CORR 2008»
13 years 7 months ago
Identification of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems
In this study the dynamic behaviour of perforated microplates oscillating under the effect of squeeze film damping is analyzed. A numerical approach is adopted to predict the effe...
Aurelio Somà, Giorgio De Pasquale
CORR
2007
Springer
47views Education» more  CORR 2007»
13 years 7 months ago
Reduced-Order Modelling of the Bending of an Array of Torsional Micromirrors
An array of micromirrors for beam steering optical switching has been designed in a thick polysilicon technology. A novel semi-analytical method to calculate the static characteri...
A. Molfese, A. Nannini, F. Pieri