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ICMENS
2005
IEEE
14 years 4 months ago
2005
IEEE
ICMENS
2005
IEEE
14 years 4 months ago
2005
IEEE
ICMENS
2005
IEEE
14 years 4 months ago
2005
IEEE
The paper presents a digital oscillating loop for a MEMS resonator in which the instantaneous resonator position is estimated on-line with a Kalman observer. The approach is appli...
ICMENS
2005
IEEE
14 years 4 months ago
2005
IEEE
A 2-mm deep microwave cavity resonator is proposed for LIGA micro-fabrication. LIGA provides highly vertical and optically smooth sidewalls, leading to potentially high quality (Q...
ICMENS
2005
IEEE
14 years 4 months ago
2005
IEEE
Abstract— In the present work we investigate nonlinear dynamics in a nanomechanical doubly clamped beam made of PdAu fabricated using bulk nanomachining and e-beam lithography. T...