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    WSC
    2008
    160views Modeling And Simulation» more  WSC 2008»
    Impact of qualification management on scheduling in semiconductor manufacturing
    14 years 1 months ago
    Impact of qualification management on scheduling in semiconductor manufacturing
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    A qualification management software that proposes recipe qualifications on tools in toolsets for semiconductor manufacturing has been developed. The qualification proposals are ba...
    Carl Johnzen, Philippe Vialletelle, Stéphan...
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