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    2011
    269views Distributed And Parallel Com...» more  IAJIT 2011»
    Evaluation for diaphragm's deflection for touch mode MEMS pressure sensors
    13 years 6 months ago
    Evaluation for diaphragm's deflection for touch mode MEMS pressure sensors
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    : In this paper, an analytical and simulation solution for touch mode Micro-electromechanical systems pressure sensor operating in harsh environment is proposed. The principle of t...
    Yadollah Hezarjaribi, Mohd Hamidon, Roslina Mohd S...
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