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ICCAD
2006
IEEE
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ICCAD 2006
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From micro to nano: MEMS as an interface to the nano world
14 years 8 months ago
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www.cecs.uci.edu
Leveraging conventional microsystems technology, MEMS has become the technology of choice for a wide range of applications including inertial sensors for automotive, games, and co...
Bernhard E. Boser
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