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    CCE
    2006
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    Modeling and temperature control of rapid thermal processing
    13 years 11 months ago
    Modeling and temperature control of rapid thermal processing
    Download  tx.technion.ac.il
    In the past few years, Rapid Thermal Processes (RTP) have gained acceptance as mainstream technology for semi-conductors manufacturing. These processes are characterized by a sing...
    Eyal Dassau, Benyamin Grosman, Daniel R. Lewin
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