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ICRA
2003
IEEE
134views Robotics» more  ICRA 2003»
14 years 5 months ago
Development of piezoelectric bending actuators with embedded piezoelectric sensors for micromechanical flapping mechanisms
This paper presents the fabrication and the testing of piezoelectric unimorph actuators with embedded piezoelectric sensors which are meant to be used for the actuation of the Mic...
Domenico Campolo, Ranjana Sahai, Ronald S. Fearing