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CORR
2007
Springer
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13 years 11 months ago
Reduced-Order Modelling of the Bending of an Array of Torsional Micromirrors
An array of micromirrors for beam steering optical switching has been designed in a thick polysilicon technology. A novel semi-analytical method to calculate the static characteri...
A. Molfese, A. Nannini, F. Pieri