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32
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WSC
2007
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Modeling And Simulation
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WSC 2007
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Reusable tool for 300mm intrabay AMHS modeling and simulation
14 years 1 months ago
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www.informs-sim.org
The transition to 300mm wafer size introduced a lot of new technologies to wafer fabrication facilities that mandated the presence of intrabay automated material handling systems ...
Ahmed El-Nashar, Khaled S. El-Kilany
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