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    DAC
    2009
    ACM
    118views Computer Architecture» more  DAC 2009»
    Provably good and practically efficient algorithms for CMP dummy fill
    15 years 5 months ago
    Provably good and practically efficient algorithms for CMP dummy fill
    Download  www.ece.northwestern.edu
    Abstract--To reduce chip-scale topography variation in Chemical Mechanical Polishing (CMP) process, dummy fill is widely used to improve the layout density uniformity. Previous res...
    Chunyang Feng, Hai Zhou, Changhao Yan, Jun Tao, Xu...
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