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ACISICIS
2008
IEEE
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Information Technology
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ACISICIS 2008
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An Integer Linear Programming Approach for Dedicated Machine Constraint
14 years 6 months ago
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www.csc.lsu.edu
Dedicated machine constraint is one of the new challenges introduced in photolithography machinery of the semiconductor manufacturing system due to natural bias. Previous research...
Huy Nguyen Anh Pham, Arthur M. D. Shr, Peter P. Ch...
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