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ICPR
2000
IEEE
15 years 17 days ago
Nanometer-Scale Height Measurements in Micromachined Picoliter Vials Based on Interference Fringe Analysis
Micromachined picoliter vials in silicon dioxide with a typical depth of 6.0?m are filled with a liquid sample. Epiilluminated microscopic imaging during evaporation of the liquid...
L. R. Van den Doel, Lucas J. van Vliet, K. T. Hjel...