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34
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ICIP
2010
IEEE
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Image Processing
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ICIP 2010
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Stochastic gradient descent for robust inverse photomask synthesis in optical lithography
13 years 11 months ago
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Optical lithography is a critical step in the semiconductor manufacturing process, and one key problem is the design of the photomask for a particular circuit pattern, given the o...
Ningning Jia, Edmund Y. Lam
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