ASPDAC
2008
ACM
14 years 9 months ago
2008
ACM
Phase shifting mask (PSM) is a promising resolution enhancement technique, which is used in the deep sub-wavelength lithography of the VLSI fabrication process. However, applying ...
ICRA
2003
IEEE
15 years 5 days ago
2003
IEEE
- In this paper we describe the navigation and planning of the i-Fork system, a flexible AGV intended to operate in partially structured warehouses where frequent floor plant layou...