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26
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WSC
2008
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Modeling And Simulation
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WSC 2008
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Simulation analysis of semiconductor manufacturing with small lot size and batch tool replacements
14 years 1 months ago
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www.informs-sim.org
Long cycle times in semiconductor manufacuring represent an increasing challenge for the industry and lead to a growing need of break-through approaches to reduce it. Small lot si...
Kilian Schmidt, Oliver Rose
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