Sciweavers

CORR
2008
Springer
60views Education» more  CORR 2008»
13 years 11 months ago
Enhanced Sensing Characteristics in MEMS-based Formaldehyde Gas Sensor
In this study, the proposed sensor integrates a sensing layer, a heating device, and electrodes on the substrate. The micro heater is integrated in the sensor to provide instantan...
Yu-Hsiang Wang, C.-C. Hsiao, Chia-Yen Lee, Rong-Hu...