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21
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JDCTA
2010
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JDCTA 2010
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A Novel Non-driven Structural MEMS-based Gyroscope
13 years 6 months ago
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www.aicit.org
This paper describes a unique capacitively-sensed MEMS-based gyroscope, which utilizes rotating carrier rotate as driven force and responds to an external angular rate of yaw due ...
Lifeng Wu, Fuxue Zhang
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