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TCAD
2008
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13 years 11 months ago
Metal-Density-Driven Placement for CMP Variation and Routability
In this paper, we propose the first metal-density driven placement algorithm to reduce CMP variation and achieve higher routability. Based on an analytical placement framework, we...
Tung-Chieh Chen, Minsik Cho, David Z. Pan, Yao-Wen...