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    A multiscale systems approach to microelectronic processes
    14 years 14 days ago
    A multiscale systems approach to microelectronic processes
    Download  brahms.scs.uiuc.edu
    This paper describes applications of molecular simulation to microelectronics processes and the subsequent development of techniques for multiscale simulation and multiscale syste...
    Richard D. Braatz, Richard C. Alkire, Edmund G. Se...
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