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ASPDAC
2001
ACM
102views Hardware» more  ASPDAC 2001»
14 years 3 months ago
New graph bipartizations for double-exposure, bright field alternating phase-shift mask layout
Abstract-- We describe new graph bipartization algorithms for layout modification and phase assignment of bright-field alternating phaseshifting masks (AltPSM) [25]. The problem of...
Andrew B. Kahng, Shailesh Vaya, Alexander Zelikovs...