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    CCE
    2006
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    An object-oriented framework for modular chemical process simulation with semiconductor processing applications
    14 years 4 months ago
    An object-oriented framework for modular chemical process simulation with semiconductor processing applications
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    This paper discusses the development of a set of object-oriented modular simulation tools for solving lumped and spatially distributed models generated from chemical process desig...
    Jing Chen, Raymond A. Adomaitis
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