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    ASPDAC
    2008
    ACM
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    An MILP-based wire spreading algorithm for PSM-aware layout modification
    14 years 2 months ago
    An MILP-based wire spreading algorithm for PSM-aware layout modification
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    Phase shifting mask (PSM) is a promising resolution enhancement technique, which is used in the deep sub-wavelength lithography of the VLSI fabrication process. However, applying ...
    Ming-Chao Tsai, Yung-Chia Lin, Ting-Chi Wang
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