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DAC
1989
ACM

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An Efficient Finite Element Method for Submicron IC Capacitance Extraction

14 years 3 months ago

We present an accurate and efficient method for extraction of parasitic capacitances in submicron integrated circuits. The method uses a 3-D finite element model in which the cond...

N. P. van der Meijs, Arjan J. van Genderen

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