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    ACM
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    Practical iterated fill synthesis for CMP uniformity
    15 years 16 days ago
    Practical iterated fill synthesis for CMP uniformity
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    We propose practical iterated methods for layout density control for CMP uniformity, based on linear programming, Monte-Carlo and greedy algorithms. We experimentally study the tr...
    Yu Chen, Andrew B. Kahng, Gabriel Robins, Alexande...
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