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    CCECE
    2011
    IEEE
    305views Electrical And Computer Engi...» more  CCECE 2011»
    A simulator for local anodic oxidation of silicon surfaces
    12 years 11 months ago
    A simulator for local anodic oxidation of silicon surfaces
    Download  www.iue.tuwien.ac.at
    Models for the local anodic oxidation of silicon using scanning tunneling microscopy and non-contact atomic force microscopy are implemented in a generic process simulator, using ...
    Lado Filipovic, Hajdin Ceric, Johann Cervenka, Sie...
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