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    A BE-SOI MEMS for Inertial Measurement in Geophysical Applications
    13 years 6 months ago
    A BE-SOI MEMS for Inertial Measurement in Geophysical Applications
    Download  hal-lirmm.ccsd.cnrs.fr
    —In this paper, an inertial transducer developed in bulk and etch silicon-on-insulator microelectromechanical-system technology is presented. The device is suitable for low-frequ...
    Bruno Ando, Salvatore Baglio, Gaetano L'Episcopo, ...
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