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    CCE
    2006
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    Modeling and temperature control of rapid thermal processing
    14 years 2 months ago
    Modeling and temperature control of rapid thermal processing
    Download  tx.technion.ac.il
    In the past few years, Rapid Thermal Processes (RTP) have gained acceptance as mainstream technology for semi-conductors manufacturing. These processes are characterized by a sing...
    Eyal Dassau, Benyamin Grosman, Daniel R. Lewin
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