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2010
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AR 2010
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Driving Characteristics of a Surface Acoustic Wave Motor using a Flat-Plane Slider
13 years 8 months ago
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www.kurosawa.ip.titech.ac.jp
We discuss the use of a flat-plane slider for a surface acoustic wave (SAW) motor. For stable driving, the SAW motor requires a silicon slider with many microprojections on its su...
Koki Sakano, Minoru Kuribayashi Kurosawa, Takashi ...
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