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CORR
2007
Springer
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13 years 11 months ago
Model of Electrostatic Actuated Deformable Mirror Using Strongly Coupled Electro-Mechanical Finite Element
The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices i...
V. Rochus, J.-C. Golinval, C. Louis, C. Mendez, I....