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    WSC
    2008
    127views Modeling And Simulation» more  WSC 2008»
    An optimization framework for waferfab performance enhancement
    14 years 1 months ago
    An optimization framework for waferfab performance enhancement
    Download  www.informs-sim.org
    A typical wafer fab requires numerous decisions for daily operations. Even small decisions on system configurations may have significant impact on the overall fab performance. One...
    Daniel Noack, Boon-Ping Gan, Peter Lendermann, Oli...
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