Sciweavers
Explore
Publications
Books
Software
Tutorials
Presentations
Lectures Notes
Datasets
Labs
Conferences
Community
Upcoming
Conferences
Top Ranked Papers
Most Viewed Conferences
Conferences by Acronym
Conferences by Subject
Conferences by Year
Tools
Sci2ools
International Keyboard
Graphical Social Symbols
CSS3 Style Generator
OCR
Web Page to Image
Web Page to PDF
Merge PDF
Split PDF
Latex Equation Editor
Extract Images from PDF
Convert JPEG to PS
Convert Latex to Word
Convert Word to PDF
Image Converter
PDF Converter
Community
Sciweavers
About
Terms of Use
Privacy Policy
Cookies
20
click to vote
CORR
2008
Springer
92
views
Education
»
more
CORR 2008
»
Interconnect Challenges in Highly Integrated MEMS/ASIC Subsystems
13 years 8 months ago
Download
hal.archives-ouvertes.fr
Micromechanical devices like accelerometers or rotation sensors form an increasing segment beneath the devices supplying the consumer market. A hybrid integration approach to buil...
N. Marenco, S. Warnat, W. Reinert
claim paper
Read More »