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    ASPDAC
    2005
    ACM
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    Library cell layout with Alt-PSM compliance and composability
    14 years 5 months ago
    Library cell layout with Alt-PSM compliance and composability
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    The sustained miniaturization of VLSI feature size presents great challenges to sub-wavelength photolithography and requests usage of many Resolution Enhancement Techniques (RET)....
    Ke Cao, Puneet Dhawan, Jiang Hu
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