WSC
2000
14 years 25 days ago
2000
Integrated factory models of semiconductor fabrication facilities allow conclusions to be drawn on the impact of a given Automated Material Handling System (AMHS) and interactions...
WSC
2001
14 years 26 days ago
2001
The purpose of this research was to identify the factors in a wafer fabrication facility that significantly affect the cycle times of two main technologies that are currently in p...