ISPD 2007 International Symposium on Physical Design
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Wall of Fame | Most Viewed ISPD-2007 Paper
ISPD
2007
ACM
13 years 6 months ago
2007
ACM
When VLSI technology scales toward 45nm, the lithography wavelength stays at 193nm. This large gap results in strong refractive effects in lithography. Consequently, it is a huge...
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