— A novel method to extract the efficient model for Metal-Oxide-Semiconductor (MOS) transistors in order to satisfy a specific accuracy is presented. The approach presented here utilizes a Genetic Algorithm (GA) to choose the necessary physical and heuristic elements in order to define a compact yet accurate model for MOS I-V characteristic. Then the values of the free parameters related to each element are determined using Simulated Annealing (SA). For a desired accuracy considered here, the accuracy of the results predicted