Hardware Platforms for MEMS Gyroscope Tuning Based on Evolutionary Computation Using Open-Loop and Closed-Loop Frequency Respons

Abstract. We propose a tuning method for MEMS gyroscopes based on evolutionary computation to efficiently increase the sensitivity of MEMS gyroscopes through tuning. The tuning method was tested for the second generation JPLlSoeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation We also report on the development of a hardware platform for integrated tuning and closedloop operation of MEMS gyroscopes.The control of this device is implemented through a digital design on a Field Programmable Gate Array (FPGA). The hardware platform easily transitions to an embedded solution that allows for the miniaturization of the system to a single chip.

• Type: Conference
• Year: 2005
• Where: ICES
• Authors: Didier Keymeulen, Michael I. Ferguson, Wolfgang Fink, Boris Oks, Chris Peay, Richard Terrile, Yen Cheng, Dennis Kim, Eric MacDonald, David Foor
• Keywords: ICES 2005, MEMS Device, Mems Gyroscope, MEMS Gyroscopes.The Control