Towards STEM control: Modeling framework and development of a sensor for defocus control

— Scanning transmission electron microscopes are indispensable tools for material science research, since they can reveal the internal structure of a wide range of specimens. Thus, it is of scientific and industrial interest to transform these microscopes into flexible, high-throughput, unsupervised, nanomeasuring tools. To do so, processes that are currently executed manually based on visual feedback (e.g., alignment or particle measurement) should be automated, taking into consideration their time dependencies. That is, these microscopes should be studied from the systems and control perspective. To the best of our knowledge, such perspective is lacking in the literature. Thus, it is provided here through a new modeling framework that facilitates the future development of control strategies based on image analysis. The progress made towards developing an image-based sensor for defocus control is also reported. Finally, the paper also aims to introduce scanning transmission electr...

• Type: Conference
• Year: 2009
• Where: CDC
• Authors: Arturo Tejada, Wouter Van den Broek, Saartje W. van der Hoeven, Arnold Jan den Dekker
• Keywords: CDC 2009, Control Systems, Scanning Transmission Electron Microscopy, Transmission Electron, Transmission Electron Microscopes